Used TEL / TOKYO ELECTRON Trias #9162309 for sale
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ID: 9162309
Wafer Size: 12"
Vintage: 2008
CVD System, 12"
(1) Trias platform
(1) UVRF Module
(1) High-K CVD module
(1) SPA-N Module
(1) LPA Module
Includes:
Carrier ID reader
(2) Light stacks
Transfer navigation system
3rd Loadport
UPS
FFU Chemical filter
Maintenance kit
Rear step(UVRF / High-K / SPA-N)
(3) TC Wafers
Floor plate
OES Monitor(SPA-N)
Gas filter(SPA-N)
(1) TEL Standard CIM / FA
(1) Linux OS modification for CND2
2008 vintage.
TEL / TOKYO ELECTRON Trias is an etching/ashing equipment manufactured by TEL, one of the leading semiconductor equipment companies. TEL Trias is designed for reducing cycle times without sacrificing accuracy or quality in production processes. The machine is equipped with an array of advanced features such as high-speed plasma processing, lithography capabilities and plasma-assisted cleaning. It also offers high-precision etching of semiconductor devices and provides high-density plasma to achieve sub-half micron resolutions. Additionally, TOKYO ELECTRON Trias offers excellent uniformity in the etching processes and provides a wide range of materials to be etched, including copper, aluminum, tungsten and rods. In addition, Trias is capable of etching a wide variety of selectivity ratios, which enables the production of etch-proof electronic components. The machine can even be used for etching multiple layers of material with an accuracy of up to 50 nm. What is also remarkable about the machine is its ability to maintain high-level reliability and quality throughout the entire production process. This is achieved using advanced diagnostics and remote-control capability for on-the-fly optimization. TEL / TOKYO ELECTRON Trias is also designed for long-term total ownership cost optimization, and its modular design allows for easy, cost-saver upgrades to ensure efficient production line. On top of that, the machine is designed to be extremely user-friendly. Featuring intuitive menus and easy-to-follow instructions, TEL Trias is highly recommended for mass production needs. It also boasts a unique tool-less maintenance feature, enabling operators to quickly and easily repair breakdowns and perform preventive maintenance with minimal downtime. Overall, TOKYO ELECTRON Trias is a state-of-the-art production process equipment that is designed to deliver quality and accuracy in semiconductor etching. With its advanced processor and its wide range of plasma-assisted etching capabilities, the machine is ideal for those who require cost-effective, precision etching of high-density, multi-layer materials.
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