Used TEL / TOKYO ELECTRON Trias #9216068 for sale

TEL / TOKYO ELECTRON Trias is a fully automated systems etcher/asher designed for process integration. It provides advanced device fabrication technology, with a high degree of precision for etching and ashing process optimization. The equipment delivers uniform etching and ashing process results, using optimized phase shifts and process parameters. It is equipped with parallel load locks, enabling simultaneous loading of multiple substrate sizes. The etching and ashing operational capability is further enhanced by an advanced Active Level Control System (ALCS), which utilizes real-time monitoring of process conditions and maintains sample temperature accuracy of +/- 0.1°C. The unit is able to etch and ashing single wafer and continuous wafer process applications simultaneously, with the etching rate being controllable with a precision of 1000 angstroms. Etching and ashing process consistency is maintained through a high power ion gun and an advanced exhaust gas component. The machine offers a wide range of process chemistries for etching and ashing various types of materials. The tool is designed to perform high accuracy etching of patterned and unpatterned substrates. The dual focus optical asset enables etching at different feature densities with fine line accuracy and optical alignment. The optically induced Coulomb potential enables precision control of the edge termination during etching and profile control. The model is equipped with an independently controlled heater equipment to maintain substrate temperature. The system also integrates a fully automated plasma etch chamber and an advanced ion source for etching of sub-micron feature sizes. High precision repeatability is obtained through the use of a multiple nozzle etch head that is coupled to an exhaust gas component. With its high processing throughput and pulse-based etching techniques, the unit delivers excellent etch results in shortest possible time. Furthermore, the machine also offers advanced safety features such as expanded range of ESD protection, comprehensive gas safety tool, and advanced plasma shield that enable safe and reliable operation. In summary, TEL Trias asset offers an invaluable tool for process integration, capable of providing advanced device fabrication technology with an unprecedented level of precision and consistency. The model is highly versatile in its applications, and offers superior performance characteristics with advanced process control algorithms, enhanced safety and environmental protection features, and high throughput.