Used TEL / TOKYO ELECTRON Trias #9225844 for sale

TEL / TOKYO ELECTRON Trias is an advanced etcher / asher used widely in the front end semiconductor production process. It is a high-performance etching and ashing process module that offers both plasma etching and dry ashing processes in one highly efficient module. This system includes a process chamber, vacuum pump package, chamber control unit, power supply equipment, and operator console. The process chamber of TEL Trias is built with the utmost attention to rigid design requirements and is engineered for outstanding uniformity and repeatability of the etching process. Its structure includes a tri-clad vacuum chamber and metal chamber bases with robust particle control for a reliable thin film etching process. The chamber walls are plated with nickel for chemical compatibility and long-term use, as well as a high resistivity that can improve etching process precision. The vacuum package of the system is designed to provide a reliable and stable machine environment, and is equipped with TEL-exclusive technologies such as a variable throttling vacuum pump, and multiple throttle points to reduce downtime and enhance the precision of etching processes. The chamber control unit is programmed with a sophisticated, multi-parameter control software to optimize process optimization, temperature and pressure control, as well as the repeatability of process runs. The power supply equipment of TOKYO ELECTRON Trias includes electron cyclotron resonance (ECR) source and source power supplies, which are driven by high-end, high-frequency RF power amplifiers. This ensures a stable and uniform etching process, which makes the production of high yields possible. The ECR source also offers various source electrode designs to create efficient processes and superior uniformity at high processing speeds. The operator console of Trias provides a straightforward, intuitive interface for a seamless, simple user experience. It comes with an integrated process library for quick data management, as well as for complete process parameter control. The console also allows extensive process monitoring and early problem detection, as well as access to data log files for complete process traceability. Overall, TEL / TOKYO ELECTRON Trias is an efficient and reliable etcher / asher designed to support the modern semiconductor production process. Its advanced durability and performance makes it an ideal choice for both the front-end and back-end parts of semiconductor fabrication.