Used TEL / TOKYO ELECTRON Trias #9235229 for sale

TEL / TOKYO ELECTRON Trias is an etcher, or asher, used in the fabrication of semiconductor devices. It is designed for a variety of etching related processes, including resist strip, wet etch, sputter etch, and descum. Utilizing radio frequency (RF) power, TEL Trias equipment can achieve precise, repeatable etching results. The system is composed of a process chamber, a vacuum pump, RF generator, and an ionizable gas delivery unit. It can accommodate up to four wafers in the process chamber at one time. The process chamber is temperature controlled, versatile, and resistant to both process and environmental contamination. Furthermore, TOKYO ELECTRON Trias machine is equipped with a vacuum pump, capable of reaching up to 5 x 10-6 torr. The RF generator produces adjustable power levels to suit a range of process requirements, from low-power wet etching to high power for faster removal rates. The RF power is applied to the sample through two independently adjustable planar electrodes, enabling complex patterns to be etched with ease. The tool's gas delivery asset allows for precise control of etch rate and endpoint detection, for precise end-point control. This gas delivery model also helps to minimize any unwanted effects from the etch process. Trias equipment includes a process visualization software package, capable of storing product recipes, analyzing the etched structure and presenting results in real time. This software package allows for easy control and monitoring of the entire etching process, and provides users with a versatile platform for precise, repeatable etching jobs. Overall, TEL / TOKYO ELECTRON Trias etching system allows for precise and repeatable fabrication of semiconductor devices, with user friendly process control and an easy-to-use interface. With its advanced features, the unit is a powerful tool for efficient and reliable etching operations.