Used TEL / TOKYO ELECTRON Trias #9235251 for sale

TEL / TOKYO ELECTRON Trias is a state-of-the-art etching and ashing equipment designed for a variety of semiconductor processes and applications. The system can etch and ash a wide range of materials, including metals, oxides, and polymers. It can also be used to create extremely precise microstructures such as lines, holes, pits, and features. The unit is powered by an advanced plasma source that combines radio frequency (RF), mid-frequency (MF), and direct current (DC) power sources with a variety of etch and ash chemistry configurations. The plasma source is highly adjustable, allowing operators to finely tune their etching and ashing processes. The machine comes equipped with a vacuum chamber, showering tool, vision asset, load lock, and process controller. The model has an intuitive graphical user interface that allows users to quickly set up and troubleshoot their processes. All parameters are adjustable across a wide range, including etching and ashing pulse widths, line and space widths, and other critical etch and ash reaction characteristics. The equipment also features in situ measurement and control of etch and ash completion points. The system's automated decision-making algorithms allow it to anticipate, preventive, and avoid any process instability, ensuring years of reliable and cost-effective operation. The flexible design of the unit also allows it to be easily modified and upgraded with the latest process equipment and developments within the etch and asher industry. Finally, the machine is backed by a global network of aftersales service engineers and technicians, ensuring users get the most from their etch and asher systems. TEL Trias is an advanced solution for a variety of semiconductor etch and ashing processes and applications, offering users outstanding process performance, durability, and a cost-effective investment.