Used TEL / TOKYO ELECTRON Trias #9241671 for sale
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ID: 9241671
Wafer Size: 12"
CVD System, 12"
(4) Process chambers (TiN)
Front end station
Transfer module
(4) Additional chambers included.
TEL / TOKYO ELECTRON Trias is a fully-automated etching machine that combines the advanced technologies of etching, patterning, and stripping into one direct equipment. This compact yet robust system features the newest developments in etching technology, as well as a user-friendly interface and precise processing. As a result, it is highly-versatile and is ideal for various applications in the semiconductor industry. TEL Trias features the latest etching technologies such as plasma reactive ion etching (RIE) and chemical vapor deposition (CVD). It also includes a quartz boat, a potentiostat, and a power supply unit, allowing for complete control over the pattern transfer process. Thanks to its innovative laser-addressing function, TOKYO ELECTRON Trias is able to etch and pattern down to the micron-scale level of precision. Trias is equipped with a number of safety features, including an advanced leak detector and pressure gauge machine, plus a fully-enclosed processing space. These features ensure that the atmosphere is safe and free from hazardous particles and helps to ensure optimal surface cleanliness. The user interface in TEL / TOKYO ELECTRON Trias is intuitive and easy to use, allowing for maximum efficiency and productivity. The top panel is color-keyed and divided into four sections, providing access to all of the Ethernet and PLC device setting functions. The large touch screen monitor further simplifies the operation process. TEL Trias offers a number of optional features, such as an automatic substrate/sample transfer tool, an electrometer asset, and an integrated strip capability. These features provide even more power and flexibility for a wide variety of process applications. TOKYO ELECTRON Trias is a highly advanced and versatile etching machine that combines the latest etching and patterning technologies into one compact model. With its user-friendly interface, a wealth of optional features, and advanced safety features, Trias is perfect for a multitude of semiconductor processing tasks.
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