Used TEL / TOKYO ELECTRON Trias #9261887 for sale

TEL / TOKYO ELECTRON Trias is an advanced, flexible platform for plasma etching and ashing processes. It is designed to meet the rigorous demands of today's challenging plasma asher and etcher applications. Its modular design and robust construction make it highly reliable in a variety of processing requirements, with the capability to process wafers ranging in size from 4" up to 8". The advanced features of TEL Trias include a durable quartz ceramic shield liner, which provides a layer of protection between the volatile plasma and the process chamber. This liners eliminates chemical back diffusion, making the equipment preferably suitable for the most sensitive processes. It also features a patent-pending RF electrode design, which ensures maximum energy control during etching and ashing. The electrodes have a low inductance and feature an optimized upper electrode design, which ensures uniform etching and ashing processes. In addition to these features, TOKYO ELECTRON Trias features a low-turbulence gas flow design, which optimizes etching and ashing process uniformity and repeatabilityby creating a low-turbulence gas flow pattern. The gas flow helps to minimize non-uniformity distributed across the wafer, resulting in consistently uniform process results with higher yields. The system also features a broad range of process parameters, allowing the user to tailor the etching and ashing process for different applications. The advanced software package guides the operator through each step, from process configuration to sample loading and processing. This flexibility allows users to easily adapt Trias to their specific needs or to rapidly develop a new process. Overall, TEL / TOKYO ELECTRON Trias is an advanced, reliable etcher / asher unit. Its combination of features make it suitable for a variety of process requirements, and its flexible operation makes it easy to configure and operate. With this machine, users can be confident that they will get consistently high-quality results no matter the specific application.