Used TEL / TOKYO ELECTRON Trias #9261888 for sale

TEL / TOKYO ELECTRON Trias is an advanced etcher/asher that provides high throughput, proven long-term performance and superior process yields. The equipment features an automated system architecture, allowing users to quickly switch etching and ashing processes, expanding the unit's capability. With a multi-chamber design, the machine is able to run both etching and ashing processes simultaneously, providing users with maximum utilization and flexibility in their production lines. TEL Trias features outstanding etch rate uniformity, allowing users to etch with a limited batch size and high etch rate for thin-line aspects and uniform grain alignment. The automatic chamber switch technology allows users to perform cycle times as small as one second, making the tool more efficient. The asset also optimizes production processes based on complex design guidelines, increasing product quality and reliability. The model is built with a high-precision, direct drive robot platform and an advanced input/output control equipment, allowing users to program complex patterns with high accuracy. The etch rate measured by the direct drive robot platform is extremely accurate, reducing line design error margins. In addition, the system is also equipped with a PPF (Process Parameter File) function, allowing users to replicate process parameters when moving from one chamber to another. The unit is designed to be robust and reliable, featuring a motion control machine with a feedback loop, minimal adjusting pulse time, high-efficiency power driver, and advanced jog run systems. Users can also customize run times to suit their production requirements. Furthermore, the tool is equipped with advanced SPC (Statistical Process Control) and optimization capabilities to further ensure product quality and process efficiency. TOKYO ELECTRON Trias is perfectly suited for applications such as precision etching and plasma ashing. With its advanced features, robust construction, and ease of use, Trias helps users to achieve desired products with increased process yields and improved product quality.