Used TEL / TOKYO ELECTRON Trias #9273449 for sale
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ID: 9273449
Wafer Size: 12"
System, 12"
(8) Chambers
Front end
Wafer transfer module
Electrical cabinet.
TEL / TOKYO ELECTRON Trias is an industry-leading, high-quality, precision etching/ashing equipment. Its superior design makes it one of the most technologically advanced etchers available, and it's capable of consistently producing high-precision parts for a wide variety of applications. TEL Trias is designed to use a range of etching and ashing technologies including Dry Etching, Reactive Ion Etching (RIE), Sputter Etching, and Ashing by Laser Ablation. It offers a great deal of versatility, allowing it to be used for a variety of applications, from thin-film deposition and etching processes to markings and STI (Shallow Trench Isolation) applications. In addition, the system is equipped with state-of-the-art control and precision features. The user-friendly programming interface allows for precise and repeatable etching/ashing processes. The automated monitoring unit helps to ensure consistent results each time, as does the smart auto-coordinate feature that makes it possible to replicate an etching template to ensure uniformity. TOKYO ELECTRON Trias also features a high-precision three-stage coated chuck machine that permits excellent etching and ashing accuracy. This chuck tool can be used to perform multiple etch and ashing operations, or to work with retractable or adjustable support pins. This allows users to task Trias with a variety of complex etch and ashing tasks. Finally, TEL / TOKYO ELECTRON Trias is designed to be compact yet flexible. Its small footprint helps to keep costs low and its ability to be quickly re-configured as needed means it can be used for a variety of tasks. All in all, TEL Trias is an outstanding etching/ashing asset capable of producing precise results time and time again. Its versatile design makes it ideal for a wide range of professional production applications, while its control and precision features help to ensure reliability and consistency.
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