Used TEL / TOKYO ELECTRON Trias #9290896 for sale

TEL / TOKYO ELECTRON Trias is a versatile, high-speed, and economically priced etcher / asher designed specifically for industrial and academic research and development applications. It is capable of safely etching, depositing, and etching back a variety of thin film materials from a wide range of substrates. TEL Trias features an intuitive touch-screen interface allowing for simple and efficient operation. Substrates of up to 12" in diameter and 0.5" thick can be accommodated. The interior of the sealed chamber is accessed by a hinged door, allowing for convenient control of process parameters. The etching process is driven by an ultra-high frequency generator with a frequency range of 10 to 50 kHz. The precise control of etching power is accomplished via an adjustable power supply which allows for the optimization of etching process parameters. TOKYO ELECTRON Trias also features a range of high-tech options, including a constant-current bias supply for metal deposition control, a high-energy gas distributor to allow for the deposition of high-density thin films, and a high voltage deballasting system to improve etching uniformity. The etch rate and etch selectivity of all thin films can be accurately controlled with a precision gas flow controller. The parameters of all processes can be pre-programmed to streamline operations. Trias is designed to ensure safety, compliance, and environmental protection. TEL / TOKYO ELECTRON Trias is an easy-to-use and reliable etcher / asher capable of meeting the requirements of the most demanding research and development applications. Its user-friendly interface makes it an attractive choice for those working within the science and engineering industry.