Used TEL / TOKYO ELECTRON Trias #9355862 for sale

TEL / TOKYO ELECTRON Trias is an etcher/asher used in performing an etching or ashing process. It is an advanced equipment designed to offer consistent, high-quality and high-performance surface processing of wafers. It is a highly versatile and reliable system that can be used for a variety of etching and ashing applications. The unit is based on a three-stage design concept TEL Trias - which provides three different types of etching/ashing processes: Plasma-Based Etching, LPCVD Etching, and Cluster Etching. The patented TOKYO ELECTRON Trias design reduces the duration of each etching/ashing process and, because it employs a three-stage design, the number of different etching/ashing tools necessary for a given process can be significantly reduced. The Plasma-Based Etching stage provides a high-performance process for etching-type processes, allowing for tight control and uniformity of etch results. The LPCVD etching stage is built on thermally-induced methodologies and provides an improved level of process repeatability. The Cluster Etching stage offers a truly unique and effective method for providing a reliable etch/ash process. Its patented design uses multiple gas phase etch/ash processes to provide uniform, precise etching and ashing of various substrates. Trias machine is an ideal etcher/asher for advanced and sophisticated applications. It provides superior performance, reliable repeatability, and uniform results. Furthermore, it can be used for a wide range of applications, from shallow trench isolation (STI) to surface-planarization for memory devices. It is a reliable and reliable etcher/asher for any etching or ashing need.