Used TEL / TOKYO ELECTRON Trias #9378307 for sale

TEL / TOKYO ELECTRON Trias is a high-performance etcher / asher designed for use in modern semiconductor fabrication processes. TEL Trias series etchers are designed for high throughput and reliability, utilizing a variety of advanced techniques to ensure each step of the etching process is completed accurately and quickly. As such, TOKYO ELECTRON Trias has become a popular choice for semiconductor fabrication processes such as 3D IC packaging and MEMS fabrication. Trias series utilizes a closed loop equipment to control the entire etching process. This closed loop system makes use of a three-axis gas shower in order to achieve uniform etching across the entire substrate. A PID (Proportional-Integral-Derivate) controller is then used to ensure accurate substrate temperatures are maintained throughout the etching process. This closed loop unit is further complemented by TEL / TOKYO ELECTRON Trias' automated waft control machine, which allows etching of multiple substrates at once with uniform etching results. TEL Trias series is also distinguished by its variable-frequency microwave coils and advanced plasma generator. These components are used to generate a uniform plasma of all desired etchant gases. This allows TOKYO ELECTRON Trias to take one-step etch processes, where multiple etching steps with variable gases are completed all at once. Trias also boasts an integrated gas panel, which allows users to quickly and easily change etching gases to achieve desired results. This means users can easily switch between etching gases while keeping the etching process stable and continuous. Furthermore, the integrated gas panel also allows users to fine-tune the etching process if need be, in order to create more complex results. Lastly, TEL / TOKYO ELECTRON Trias etcher is also OSHA compliant, which is important for those looking to ensure their semiconductor fabrication process is up to safety and legal standards. As such TEL Trias is an ideal tool for those wishing to create complex and precise etching results quickly and reliably.