Used TEL / TOKYO ELECTRON Trias #9390441 for sale

TEL / TOKYO ELECTRON Trias is a multi-usage solution for etching and ashing processes. The equipment is capable of etching, ashing, and cleaning various substrates with a wide range of applications, such as microelectronic devices, semiconductor components, MEMS devices, and other materials. The system incorporates a fully automated, modular unit concept, including submerging action and control mode. Submerging action facilitates thin-film etching, preventing deposition from exceeding the upper limit, allowing for highly precise etching technology without the need for manual adjustment. The control mode facilitates precise etching and ashing with adjusted temperature control for achieving desired processes. The machine also has independent process control using a number of parameters such as upper and lower temperature setting, exposure time, and exposure power. These parameters can be adjusted individually or globally depending on the desired result and substrate. This ensures individual convenience and safety, while still providing precision and reliability. Additionally, TEL Trias is equipped with advanced display and data processing features, including recipe editing capabilities, thermal history monitoring and measurement, and diagnostic functions. The tool utilizes a special two-layer quartz tube to ensure gradual heating and thus improved etching precision. It also incorporates a linear motor drive control asset, enabling precise and repeatable steps, as well as a unique light source with a high halide lamp for accurately controlling the etching power and uniform exposure. TOKYO ELECTRON Trias also offers process compatibility with many commercially available etchants, such as HF-based acids, strippers, and thiols. During the process, imported gas and exhaust can be monitored for safe operation. And for power supply, the model uses a programmable DC and constant current source, allowing accurate control of current and voltage during etching and ashing. Finally, Trias is designed for easy maintenance and operation. It has advanced safety features and conforms to safety standards. Its modular design and cost effective installation make it an ideal choice for both laboratory and industrial applications.