Used TEL / TOKYO ELECTRON Trias #9390444 for sale

TEL / TOKYO ELECTRON Trias is a high-precision plasma etching and ashing processing tool, ideal for applications in a variety of industries, including the electronics, automotive, and aerospace industries. It utilizes a high-density plasma source that enables extremely precise and advanced etching and ashing functionality. This functionality makes the etcher/asher a powerful tool for a variety of specialized processing needs. TEL Trias etcher/asher features an 11-inch color LCD touch panel, allowing for easy programming, adjustment, and operation. It also contains an industry-standard high-density plasma source, which enables efficient and consistent performance. Additionally, it provides excellent process control and repeatability with two independent and simultaneous plasma sources, which can be used for precise and specialized processes. This etcher/asher also features three high-precision stages for exact positioning for high accuracy, allowing for processing of various surface shapes. TOKYO ELECTRON Trias is designed with comprehensive interlocks to protect the operator from potential radiation hazards. It is also programmable to reduce the time spent for set-up and to maximize the process efficiency by providing quick and accurate operation. This etcher/asher also features safety protection, equipped with a ground fault interrupter (GFI) to protect against electric shocks. Additionally, it is equipped with dual infrared pyrometers to measure the temperature on the wafer surface and the front of the processing chamber. Trias provides an excellent system for increasing process yield, with high-precision processes that result in outstanding quality and performance. It also delivers additional benefits such as optimal productivity with minimal waste and exceptional reliability, as well as simpler maintenance and lower costs. The system can also be combined with a variety of feed processors, loading systems, inspection systems, and other ancillary equipment to form an end-to-end solution. Overall, TEL / TOKYO ELECTRON Trias is a high-performance etcher/asher that provides excellent results and quality assurance for a variety of industries. This advanced processing tool offers precise engineering on a wide range of surfaces, with superior process control and repeatability for a variety of specialized needs. It is also equipped with several advanced features, such as an integrated monitoring system and comprehensive safety protection, which make it suitable for a breadth of applications.