Used TEL / TOKYO ELECTRON Trias #9399572 for sale

TEL / TOKYO ELECTRON Trias is an advanced etching/asher equipment developed by leading process equipment manufacturer, TEL. This high-end system was designed for a wide range of industrial etching/asher applications, such as the production of semiconductor devices and flat panel displays. TEL Trias features an advanced etching/ashing chamber and process chamber to give users precise etching/ashing operations, allowing them to control the etching/ashing application with unbeatable accuracy and repeatability. The unit is equipped with an integrated vacuum machine and an array of computer-controlled hardware and software that monitors the etching/ashing progress. The tool also includes automated recipe entry and compliance with a variety of international safety regulations. Its unique hybrid pulsing plasma asset, comprised of Transformer Modulated Plasma (TMP) Technology and Standard Plasma (SP) Technology, enables TOKYO ELECTRON Trias to emit precisely-controlled plasma for consistently high etching/ashing results. The model will create a higher etching rate, accuracy and consistency, resulting in higher yields and lower rejects in comparison to other etching/ashing systems. In addition, Trias provides temperature control within the etching/ashing process chamber, with a wide temperature range between -50 °C and 450 °C. This allows users to quickly and efficiently monitor the parameters during the etching/ashing process. Moreover, this equipment is fully compatible with TOKYO ELECTRON 'AutoSampler' wafer chuck and its comprehensive 'User-interface' software, allowing users to control the etching/ashing process from one central location. Moreover, TEL / TOKYO ELECTRON Trias is designed with a high level of safety and environment protection features, such as a powerful fan for the extraction of hazardous materials and the capability to monitor the process environment for potentially hazardous substances. The system also comes with an interactive instructional menu, which allows users to quickly configure the machine's setup and get a clear overview of the reproducibility of their process. Overall, TEL Trias provides an advanced etching/ashing solution for users who are looking for maximum performance and reliability in their etching/ashing operations. This unit is ideal for semiconductor and flat panel display manufacturers who demand the highest levels of accuracy and consistency of their etching/ashing process.