Used TEL / TOKYO ELECTRON Triase EX-II Plus Ti/TiN #293659307 for sale

TEL Triase EX-II Plus Ti/TiN etcher/asher is a state-of-the-art etching/ashing equipment renowned for its precise patterning and reliable performance. Utilizing the latest technology, the system provides high throughput, high throughput area coverage, and fast etching/ashing processing times. This unit offers an excellent surface-to-volume ratio as well as a lower cost-of-ownership, which makes it perfect for a variety of etching/ashing applications. Additionally, the EX-II Plus Ti/TiN also includes an integrated heating machine that ensures uniform temperature throughout the chamber, allowing for increased precision during processing. As a result, users can create precise patterns with little or no surface roughness. The Triase EX-II Plus Ti/TiN is designed for a wide range of materials, and its process recipes are customizable to each application. It features a high-resolution imaging tool that provides spot imaging up to 150 µm with a significant enhancement in surface resolution. Moreover, the asset includes a multi-electrode configuration that is capable of creating more complex designs with increased etch selectivity, resulting in extremely crisp sidewall profiles. When it comes to safety, this model has a foundation built on a strong safety management equipment, offering an enhanced process environment for users who prioritize safety in their processes. To minimize the effect of particle contamination, the system includes an integrated wafer exhaust unit. It also features an integrated source gas distribution machine that helps reduce gas flow noise, enabling users to work in a quiet but productive environment. Designed for ultimate convenience, the EX-II Plus Ti/TiN also includes a write-once, read-many (WORM) data management program for backing up, archiving, and restoring recipes quickly. Furthermore, the tool's built-in touchscreen interface allows users to monitor and control their process from the front of the asset, resulting in fast and easy set-up and execution. In conclusion, TOKYO ELECTRON Triase EX-II Plus Ti/TiN is an advanced etching/ashing model capable of delivering consistently high-quality results. Equipped with a number of features and safety protocols, the equipment enables users to efficiently and accurately create complex designs and meet their requirements with confidence.