Used TEL / TOKYO ELECTRON TSP-207H #9181874 for sale

TEL / TOKYO ELECTRON TSP-207H Plasma Asher is a high-throughput plasma etching tool for the etching and ashing of various materials. The etcher/asher is equipped with a 50mm SiH3 secondary substrate and a 15mm quartz wafer carrier. TEL TSP-207H plasma etching tool delivers optimal etching performance with its high-power, high-voltage, and highly reliable ECR plasma source. With the removable magnetron and high-frequency generator, this equipment offers excellent etching uniformity, accuracy, and repeatability. TOKYO ELECTRON TSP-207H can be easily loaded and unloaded with its cassette loader/unloader. The ECR plasma source of TSP-207H Plasma Asher generates a wide range of plasma species with a high degree of accuracy and repeatability. Its substrate temperature can be accurately incorporated into the deposition and etching process thanks to its advanced temperature control system. The asher/etcher is also equipped with process monitoring function for full control of the plasma process. The cross-section observation of etched patterns and etched surfaces are possible with a scanning electron microscope (SEM). The advanced controller is capable of performing different etch processes such as etching depth control, time, and temperature, etc. Furthermore, it is equipped with a unique, user-friendly graphics user interface (GUI) for optimal process operation. In addition, TEL / TOKYO ELECTRON TSP-207H Plasma Asher also comes with remote monitoring and control technology for remote operation, control, and maintenance. TEL TSP-207H Plasma Asher is a robust unit optimized for high throughput and reliable results. It has been designed to handle a variety of etching and ashing conditions to accommodate a wide range of processing needs, making it an ideal choice for etching and ashing operations. the machine provides outstanding precision and repeatability, while its user-friendly interface ensures easy operation.