Used TEL / TOKYO ELECTRON TSP-304 #9355303 for sale

TEL / TOKYO ELECTRON TSP-304 is an industry leading etcher or asher, designed for the most demanding wet etching and stripping applications. Featuring a large, stable wet bench design, TEL TSP-304 was first introduced in 2003 as a semi-automated etcher. TOKYO ELECTRON TSP-304 has an impressive 36" x 36" (914 mm x 914 mm) top work surface and houses up to 4 buckets of solution. At the heart of the etcher is the control panel mounted process automation controller, which controls all of the etcher functions such as solution agitation, temperature, timing, and a variety of other process control parameters. The panel also manages a range of safety functions such as malfunction diagnostics and user defined emergency shutdowns. TSP-304 offers versatile programmable gate control for a variety of etch processes including oxidation, diffusion, chemical vapor deposition, and more. Equipped with a conventional 15 cm x 20 cm quartz boat for small wafers, and able to accommodate up to two larger quartz boats, TEL / TOKYO ELECTRON TSP-304 is ideal for production Solar Cell, MEMs, and flat panel display etching. It has a built-in drain for easy maintenance, including quick replacement of multi-pint etching resistors. TEL TSP-304 was designed with convenience and safety in mind. Utilizing an upgraded safety stand, the etcher is designed to protect the user from hazardous material splashes - with no spills, leaks, or cross contamination. Maintenance is easy, too; TOKYO ELECTRON TSP-304's ergonomic design allows for easy cleaning and maintenance with minimal effort. These features make TSP-304 the ideal choice for etching applications. With its highly reliable wet etching, and its user-friendly platform, TEL / TOKYO ELECTRON TSP-304 is the perfect solution for both small and large production settings. Its state-of-the-art control system, combined with its large top work area, makes TEL TSP-304 the perfect etching solution for both production and research.