Used TEL / TOKYO ELECTRON TSP-3055DD #9252304 for sale

ID: 9252304
Wafer Size: 12"
Vintage: 2006
Dielectric etcher, 12" 2006 vintage.
TEL / TOKYO ELECTRON TSP-3055DD is a fully-featured dry-etching solution designed for large-scale industrial applications. This asher utilizes a sophisticated plasma-source and advanced gas delivery subsystem to etch a variety of materials, such as silicon, polyimide, metal alloys, and polymers, quickly and accurately. It can process wafers up to 6" in diameter, enabling efficient production of complex electronic components. TEL TSP-3055DD incorporates an advanced controller that allows for the configuration of process parameters with high accuracy and repeatability. It features high efficiency RF generators and frequency-agile power control, ensuring maximum plasma uniformity. Its computer-controlled gas delivery system allows for precise amounts of etch gasses to be dispensed on the substrate, allowing for high yield processing. In addition, TOKYO ELECTRON TSP-3055DD is large-scale and occupies minimal space. It is constructed from robust materials that ensure its durability, and is capable of continuous operation without the need for frequent maintenance. Multiple process monitor systems are included, enabling intuitive, real-time control and user-friendly data acquisition. TSP-3055DD is designed to offer users the utmost precision in etching and etch depth control. Powerful plasma sources and automated process controllers eliminate sources of unwanted variability and yield the highest quality of etched products. This asher is guaranteed to bring customers the highest levels of productivity, cost-effectiveness, and precision.
There are no reviews yet