Used TEL / TOKYO ELECTRON TSP-3055DD #9252310 for sale

ID: 9252310
Wafer Size: 12"
Vintage: 2005
Dielectric etcher, 12" 2005 vintage.
TEL / TOKYO ELECTRON TSP-3055DD is a high-performance Dry Etching Equipment designed for superior and reliable performance in a variety of applications. The system can etch through thick and thin films at high densities with high repeatability, resulting in superior repeatability and quality, making it ideal for medium- and large-scale production. The unit utilizes a proprietary disk-shaped electrostatic chuck to hold the substrate securely during processing. This ensures an adequate interface between the substrate and the etching head which helps to minimize machining error. The etching head is constructed of stainless steel with a PTFE coating to provide an increased abrasion resistance. It contains a variety of features that promote higher repeatability and improved quality while etching, such as a fully-adjustable nozzle, energy control, variable-power lasers, and a positive pressure chamber. All of these features help to reduce any potential contaminants that may have been present on the substrate, contributing to an improved etching result. TEL TSP-3055DD machine has an impressive load of 1000 wafers/h, making it suitable for large-scale production depending on demand. Furthermore, the automatic level control feature compensates for any irregularities in the substrate, resulting in an even etching process. The tool also offers a laser-marking feature that can apply a variety of logos or signs to the etching substrate. This is an easy-to-use and adaptable feature that can be used to customize individual etched items. Additionally, quality controllers can access real-time data to be able to perform quality checks and evaluate results for optimum etching process. TOKYO ELECTRON TSP-3055DD is a reliable etching machine that is suitable for a variety of applications, providing quality results with repeatable performance and efficiency.
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