Used TEL / TOKYO ELECTRON U2E-855SS-SW #9192013 for sale

TEL / TOKYO ELECTRON U2E-855SS-SW is an etch/ash process equipment designed for high throughput performance in a wide variety of process steps. It has a large active area of 855 square millimeters and is capable of handling a variety of substrates including silicon, fused silicon and glass. The system has an integrated process chamber and is powered by a frequency-controlled RF generator up to 2000 Watts of power. The unit also features a precision process control software that allows for fully programmable process conditions including etch rate, profile control, temperature control and more. TEL U2E-855SS-SW is a fully automated machine with a low-volume load lock. It also has a robust safety tool that ensures all safety measures are taken during any process conditions. The asset is nominally capable of up to 200 wafers per hour and has an 8x10 " mounting puck that allows for quick loading of many different substrate sizes. To ensure substrate temperature stability, the model has an integrated Micro Pump Module that can ensure more consistent results. The robust software package also has an advanced sequence manager that simplifies recipe creation and process parameter setting. In addition, the equipment has an integrated controller for data collection, recipes and protocols that controls the entire system from start to finish. Finally, the unit features remote diagnostics and maintenance, allowing for quick and easy troubleshooting. Overall, TOKYO ELECTRON U2E-855SS-SW is an impressive etch/ash machine that offers high performance and precision control. It is designed for a wide variety of process steps and is a great choice for manufacturers looking for an efficient and reliable etching/ashing solution.