Used TEL / TOKYO ELECTRON Unity 2 DRM #9162835 for sale

TEL / TOKYO ELECTRON Unity 2 DRM is a general-purpose etcher used for dry etching applications of all varieties. It has a unique Direct Resistance Heating (DRH) system that enables low-voltage high-current operation with precise process control. This etcher has a broad process range, with a deposit depth range from 25nm-6um and etch depths from 10-200um. It is capable of both Reactive Ion Etching (RIE) and Plasma Enhanced Chemical Vapor Deposition (PECVD) techniques. TEL Unity 2 DRM has integrated automation features that enable precise control over the process. These include a computer-controlled system for wafer preparation and handling, as well as an automated RF generator that delivers precisely the right power and voltage based on the process parameters. Its built-in auto-calibration helps to ensure consistent process repeatability. These features can not only save time, but also greatly reduce risk of human error in controlling the process. The etcher also has a built-in modular process chamber that supports up to four process gases, with platen and electric drive cover and up to four anode cassettes. The Chamber also features a patented, Controlled Ion Energy Source (CIE) that helps to maintain low pressure conditions in the process chamber and further ensure accuracy and repeatability of the etch. The etcher is highly reliable and efficient, and is able to deliver the most complex etches with high repeatability and yield. It enjoys good thermal stability, low cross-contamination, and its ergonomic design makes it easy to use. In short, TOKYO ELECTRON Unity 2 DRM is highly versatile, feature-packed, and reliable etcher that is suitable for a wide range of dry etching applications. It has automated features to ensure precision and repeatability, and its dual-level process chamber offers flexibility and reliability. It is the ideal tool for any dry etching job, whether precision etching of complex patterns or standard application etching.