Used TEL / TOKYO ELECTRON UNITY 2E 85 DD #293774796 for sale
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ID: 293774796
Wafer Size: 8"
Vintage: 2000
Oxide etcher, 8"
YASKAWA Robot
Process: Oxide
CIM: GEM
Handler
Chiller
(2) LPT
(4) Dry pumps
AC and RF Rack
2000 vintage.
TEL / TOKYO ELECTRON UNITY 2E 85 DD is an etcher/asher machine used in the semiconductor manufacturing industry. This machine is designed to create intricate designs and patterns on the surface of semiconductor devices. It utilizes a combination of dry etching, reactive ion etching and plasma etching to etch or 'etch' materials into complex patterns with precision and accuracy. It is also able to clean and ash the surface of the semiconductor device which provides improved surface roughness and optimal electrical characteristics. The machine is controlled by a central control unit, allowing for easy input of instructions for etching and ashing operations. With a design speed of 8.6 ms per second, this etcher/asher can perform multiple operations quickly and efficiently. Moreover, the alloys on the components are also heated and melted down when necessary to create soft or moldable etching details. TEL UNITY 2E 85 DD etcher/asher employs frequency RF transmission to deliver the power used in etching and ashing operations. This type of etcher/asher system uses a multi cell plasma chamber with multiple RF generators that deliver a high frequency electric field. This helps to precisely etch and ash areas in a semiconductor material. It can etch and ash a variety of materials including elemental metal, silicon-based substrate, compound, polycrystalline materials, and others. One of the great advantages of this machine is its ability to precisely etch components with smaller, finer lines and also detailed patterns. It also has superior temperature control capabilities for heat etching and soft etching. It also has a better cleaning cycle than most other etcher/asher machines, meaning it is very effective at cleaning and prepping the surface prior to etching and ashing operations. TOKYO ELECTRON UNITY 2E 85 DD etcher/asher is a reliable and accurate machine, ideal for the precise etching and ashing of substrates used in semiconductor devices. With its advanced features and precise control capabilities, it is an ideal machine for creating intricate patterns and features in a timely and cost-effective manner.
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