Used TEL / TOKYO ELECTRON UNITY 2E 85 DD #293775058 for sale

ID: 293775058
Wafer Size: 8"
Vintage: 2000
Oxide etcher, 8" YASKAWA Robot Process: Oxide CIM: GEM Handler Chiller (2) LPT (4) Dry pumps AC and RF Rack 2000 vintage.
TEL / TOKYO ELECTRON UNITY 2E 85 DD is a highly advanced etcher/asher equipment used in the semiconductor manufacturing industry. This system combines cutting-edge technology with precision engineering to deliver superior performance and reliability. TEL UNITY 2E 85 DD is designed to meet the demanding requirements of modern semiconductor fabrication processes, offering high process stability, process flexibility, and excellent process repeatability. Key Features: TOKYO ELECTRON UNITY 2E 85 DD features a unique dual-frequency capacitively coupled plasma (CCP) source, which allows for precise control of plasma density and ion energy distribution. This results in highly uniform etching and ashing across the entire substrate surface, ensuring high process yields and device performance. The unit is equipped with advanced endpoint detection capabilities, allowing for real-time monitoring of the etching/ashing process. This ensures precise control over process parameters and minimizes overetching, leading to higher process efficiency and reduced material waste. UNITY 2E 85 DD is capable of handling a wide range of substrates, including silicon, compound semiconductors, and glass substrates. The machine offers options for both resist stripping and descum processes, making it suitable for a variety of applications in the semiconductor industry. The tool's advanced process chamber design and gas delivery asset ensure excellent process repeatability and uniformity. The chamber is designed to minimize particle contamination and ensure a clean processing environment, leading to high device yields and improved reliability. TEL / TOKYO ELECTRON UNITY 2E 85 DD features a user-friendly interface and software control model, allowing for easy operation and process monitoring. The equipment is equipped with advanced automation capabilities, allowing for high-throughput processing and reduced operator intervention. Applications: TEL UNITY 2E 85 DD is ideally suited for a wide range of semiconductor manufacturing applications, including etching and ashing of thin films, pattern transfer, resist stripping, and descum processes. The system is commonly used in the production of advanced semiconductor devices such as logic devices, memory devices, MEMS devices, and power devices. Overall, TOKYO ELECTRON UNITY 2E 85 DD is a state-of-the-art etcher/asher unit offering unmatched performance, reliability, and process control. With its advanced features, wide range of applications, and user-friendly design, UNITY 2E 85 DD is a valuable asset for semiconductor manufacturers looking to achieve high-quality device fabrication and maximize production efficiency.
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