Used TEL / TOKYO ELECTRON UNITY 2E 85 DD #293775061 for sale

TEL / TOKYO ELECTRON UNITY 2E 85 DD is an advanced etcher/asher equipment that is designed to provide high precision processing capabilities for semiconductor manufacturing applications. This system is part of TEL Unity series of etching equipment, which are widely used in the semiconductor industry for patterning and etching processes. TEL UNITY 2E 85 DD is equipped with state-of-the-art technology and features that make it a versatile and reliable tool for precise material removal and plasma processing. This unit is specifically designed for deep silicon etching processes, where high aspect ratio structures need to be etched with high selectivity and uniformity. One of the key features of TOKYO ELECTRON UNITY 2E 85 DD is its dual-source configuration, which allows for simultaneous etching with two different gases. This enables the machine to achieve a wider range of process capabilities and optimize etching performance for various materials and process requirements. The tool also features a high-power RF generator, which ensures efficient plasma generation and uniform processing across the wafer. UNITY 2E 85 DD is equipped with a load-lock chamber for fast wafer loading and unloading, which minimizes process downtime and improves overall productivity. The asset also features an advanced wafer handling model with robot arm technology, which ensures precise positioning and handling of wafers during processing. In terms of etching capabilities, TEL / TOKYO ELECTRON UNITY 2E 85 DD offers a range of process gases and recipes to accommodate different material types and process requirements. The equipment is capable of handling a variety of etching chemistries, including fluorine-based, chlorine-based, and oxygen-based chemistries, to achieve high selectivity and etch rates for various materials. TEL UNITY 2E 85 DD is also equipped with advanced process control features, such as endpoint detection technology and real-time monitoring capabilities. These features enable the system to achieve accurate process control, improve etching uniformity, and ensure consistent processing results from wafer to wafer. Furthermore, TOKYO ELECTRON UNITY 2E 85 DD is designed with a user-friendly interface and intuitive software control unit, which allows for easy operation and maintenance of the machine. The tool also includes advanced safety features and gas abatement systems to ensure safe and environmentally friendly operation. Overall, UNITY 2E 85 DD is a high-performance etcher/asher asset that offers advanced processing capabilities, reliable performance, and versatility for a wide range of semiconductor manufacturing applications. With its innovative design and state-of-the-art features, this model is well-suited for demanding etching processes in the semiconductor industry.