Used TEL / TOKYO ELECTRON Unity 855DD #293594402 for sale

TEL / TOKYO ELECTRON Unity 855DD is an etcher / asher equipment designed for a wide range of materials, from SiO2 to poly-silicon. It is an inductively coupled plasma (ICP) etcher system, allowing for various substrate materials to be accurately etched with precision. It is also equipped with a self-cleaning function to maintain a high level of operational efficiency with minimal downtime. TEL Unity 855DD is equipped with a variety of features and can work with substrates such as quartz, glasses and metals. Its processing capabilities include etching of oxide layers, poly-silicon layer, silicon nitride layers and refractive indices. It is also capable of working with dielectric, polyimide and low/high-k thin films. This etching machine is also used for high-precision patterning and profiling on substrates. TOKYO ELECTRON Unity 855DD is equipped with a triple-frequency generator and a frequency matching mode, which can significantly reduce the frequency reflection of the ICP plasma source. The built-in frequency tuner also helps the unit to achieve a precise ICP plasma source matching. It also allows the machine to speed up or slow down the etch rate. The multitude of adjustment options available optimize the etching process for different materials, depending on the requirements. Unity 855DD also features an intelligent control tool, which assists with process optimization. This helps to ensure that the etching process is carried out with the highest possible accuracy. The intelligent control asset helps to reduce the possibility of defects and is able to detect and compensate for any errors in etching. The model also enables users to recall previous job parameters, allowing for quick and efficient operation when setting up a new batch of etching. TEL / TOKYO ELECTRON Unity 855DD is one of the most advanced etching systems on the market, allowing for efficient and precise etching of a wide variety of materials. Its versatile capabilities make it a useful tool for numerous fabrication processes. With the equipment's various optimization and control functions, TEL Unity 855DD can be used to achieve the best possible results for any etching job.