Used TEL / TOKYO ELECTRON Unity 85DD/W1 #293585754 for sale

TEL Unity 85DD/W1 is an etcher / asher designed for ultra-high throughput applications. It offers advanced functionality with increased production throughput and advanced wafer-level process control. The Unity 85DD/W1 is equipped with a powerful plasma source, a low pressure dry gas chamber, an advanced wafer alignment system and a fine programmable digital logic for for precise control of individual process steps. The source options for the Unity 85DD/W1 are both RF and DC. It can be used to etch a wide variety of materials, including conductors, dielectrics and organics. The RF source operates with a frequency range of 600 kHz to 200 MHz and can be used to clean, strip layers and achieve deeper etches in hard material such as metals. The DC source operates at low frequencies (up to 5kHz) and can be used for etching softer materials such as organics and etching micron-scale features. The Unity 85DD/W1 provides a low pressure dry chamber, which is capable of maintaining chamber pressure at >0.25 torr while etching process gasses are introduced into the chamber. The chamber pressure is monitored and controlled automatically; this allows for precise process repeatability and control as well as more precise wafer alignment. The Unity 85DD/W1 is equipped with a large digital logic at its core, allowing for flexibility and capability to program custom etch and strip sequences according to user needs. The digital logic also offers fast and prodigious data handling capabilities, allowing for precise performance adjustments on the fly. The Unity 85DD/W1 also has an advanced wafer alignment system. Wafers are first loaded onto a wafer cassette and then placed onto a high precision trolley, which is moved into the etcher chamber. A robot arm then moves to the trolley's location and accurately aligns the wafer before etching. The Unity 85DD/W1 is an advanced etcher / asher with an impressive range of features and functionality. Its advanced plasma source, low pressure dry chamber, digital logic and wafer alignment system allow it to achieve ultra-high throughput processes with precision control. The Unity 85DD/W1 is the etcher / asher of choice for advanced applications.