Used TEL / TOKYO ELECTRON Unity 85DD/W1 #9383235 for sale

TEL Unity 85DD/W1 is an etcher / asher, or a type of plasma etcher used in semiconductor fabrication. It is designed to create etch, burn and profile features with high precision and repeatability, allowing for consistent and accurate profile creation, even when using complex patterns. The Unity 85DD/W1 uses a process called directed energy deposition to remove material quickly and accurately over a wide variety of required etching, burning, and profiling areas. The unit is equipped with a 12" wafer transport system and a Gas Sequencing System (GSS) to optimally control the process conditions for each chip and achieve high-fidelity directed energy deposition. It offers temperature control from room temperature to 500°C and a wide range of etch gases, allowing for fast etching and burning times, even for complex patterns. To ensure the most precise etching and burning, the Unity 85DD/W1 also offers an in-situ spectrometer that is used to measure the etchant concentration and monitor the etching process. The spectrometer also ensures the most consistent process possible and can be customized to meet customer requirements, if necessary. TOKYO ELECTRON Unity 85DD/W1 also features an Automatic Deposition Control Unit (ADCU), which automatically adjusts the etching or burning parameters to realize reliable depositions with the most energy efficient method possible. The ADCU utilizes a number of sensors and feedback loops to maintain a stable temperature and optimum energy for deposition. TEL / TOKYO ELECTRON Unity 85DD/W1 is an extremely precise and reliable etcher / asher designed for demanding semiconductor fabrication needs. With its powerful directed energy deposition system, in-situ spectrometer, and Automatic Deposition Control Unit, this unit can deliver high-quality etching and burning results with a high degree of accuracy. This makes it a great choice for creating the most intricate and complex patterns possible.