Used TEL / TOKYO ELECTRON Unity 85DI #9092959 for sale

TEL / TOKYO ELECTRON Unity 85DI is a dedicated etching/ashing equipment designed for superior accuracy, reliability, and performance. It is a high-end tool for photomask fabrication, particularly in the Semiconductor and MEMS industries. The system offers a range of features that allow users to precisely control the width, depth, and uniformity of their etched patterns. TEL Unity 85DI employs Volume Manufacturing Technology (VMT) to precisely control each exposure and etching step. This includes maximizing uniformity and resolving fine patterns accurately. A range of exposure tools, such as an SxV mask aligner and E-beam writer, can be used for creating the photomask. This unit is designed to precisely turn patterns into a thin resist film substrate in a single step. TOKYO ELECTRON Unity 85DI supports a variety of etching techniques, including Plasma Sub-Ashers, Plasma Ashers, and Wet Process Processors. The Plasma Sub-Ashers, for example,offer advanced plasma etching and dry etching, dry ashing, and dry stripping capabilities. Users will find these tools useful for creating small contact patterns, especially for applications such as MEMS fabrication. Unity 85DI also offers a comprehensive suite of safety and environmental features. These include multiple chemical containment systems, including a fluid filtration machine and a chemical waste disposal tool. Additionally, this tool is equipped with Glove Contamination Control (GCC) to help reduce the risk of cross-contamination between wafers. Furthermore, the asset is designed to be user friendly and efficient. It comes with an intuitive GUI, while also offering operators inline-sensing and process-monitoring capabilities. This allows users to observe the whole etching and ashing processes remotely. The model also offers various high-end automation options to help manage and optimize production flows. TEL / TOKYO ELECTRON Unity 85DI is an ideal tool for photomask fabrication and MEMS fabrication because of its superior accuracy, reliability and performance. It also provides users with excellent safety features and the ability to optimize production processes. Overall, TEL Unity 85DI can be a valuable addition to any fabrication lab.