Used TEL / TOKYO ELECTRON Unity 85DP #9083612 for sale

TEL / TOKYO ELECTRON Unity 85DP
ID: 9083612
Vintage: 1996
Etchers, 1996 vintage.
TEL / TOKYO ELECTRON Unity 85DP is a leading etcher / asher provided by TEL (TOKYO ELECTRON) for use in semiconductor manufacturing. This advanced tool offers a number of powerful features that make it an ideal choice for processing wafers from several materials including silicon, quartz, aluminum, and metal-oxide-semiconductor (MOS) materials. TEL Unity 85DP is a two-pocket etcher / asher that has an automated wafer handling equipment with up to 15 pockets. The tool has the ability to process up to 8 wafers in each of its two etch / asher cycles. It is equipped with a highly efficient, eight-stage multielement capacitor array that allows for precise control of solution flow, temperature, and pressure. It can also provide rapid etching of various materials in order to meet tight process specifications. TOKYO ELECTRON Unity 85DP has an advanced control system that provides automated operation and maintenance functions. It is equipped with a graphical user interface, as well as a parallel and serial communication port, for efficient data transfer. It also offers data logging and traceability with a built-in memory for storing process codes and trace file format files. Unity 85DP has a wide range of safety features that protect operators and the environment against the dangers of handling hazardous chemicals. It features built-in safety features like a temperature stabilization unit, residue washer, particle filtration machine, recirculation tool, and an automatic pressure release asset. The tool also has helpful production data reporting functions that provide detailed information on wafer characteristics and results. Overall, TEL / TOKYO ELECTRON Unity 85DP offers an advanced level of performance in etching and ashing a wide variety of materials for a more efficient and cost-effective semiconductor manufacturing process. Its automated operation and safety features allow operators to work with full peace of mind and assurance of quality and reliability. With its comprehensive monitoring and data logging features, TEL Unity 85DP provides a tool for optimizing and controlling the process with maximum efficiency.
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