Used TEL / TOKYO ELECTRON Unity 88DD #146068 for sale

TEL / TOKYO ELECTRON Unity 88DD is an etcher / asher designed for advanced semiconductor processing. It handheld optical head with an extra-large anode size is ideal for efficiently etching and ashing processes of high aspect ratio features. This etcher / asher features a two-step etching process that delivers precise results with minimal dishing, sidewall roughness, and etch damage. This allows a higher topography, as well as high aspect ratio and high aspect ratio linearity, which results in improved yields. In addition, TEL Unity 88DD's high-resolution optical head provides superior resolution and sharp edge definition for all etching and ashing applications. Also featured in TOKYO ELECTRON Unity 88DD is a high-temperature argon plasma source that enables process flexibility and gives an improved selectivity for all dry etch applications. An active lift-off capability is available for creating structures in centimeter-level reaching depths, allowing for greater process repeatability, uniformity, and control. Unity 88DD's advanced system management includes a host computer to display process, setup, and recipe data, as well as temperature and pressure monitoring systems. This enables users to simultaneously monitor multiple parameters and view simultaneous parameters to assure complete process accuracy. A remote operator interface provides instant access to all components to facilitate effective process management and troubleshooting. Finally, TEL / TOKYO ELECTRON Unity 88DD is designed for long-term reliability and dependability, with a life-cycle of up to 100,000 operations, ensuring users receive the utmost reliability and performance. TEL Unity 88DD is an optimal choice for state-of-the-art etch and asher applications for advanced semiconductor processing.