Used TEL / TOKYO ELECTRON Unity EP #133474 for sale

TEL / TOKYO ELECTRON Unity EP is a state-of-the-art etcher or asher designed for the semiconductor market. With its unparalleled processing capabilities, TEL Unity EP ensures exact, repeatable device geometries, regardless of the application. TOKYO ELECTRON UNITY-EP is based on a highly modular design concept, allowing it to be tailored to meet a wide range of needs. The system consists of three main features: a process chamber, a power supply, and a micro-processing center. Three additional modules are also included, providing additional functionalities such as wafer processing, wet bench cleaning, and etch-sensing capability. TEL UNITY-EP's process chamber is constructed from stainless steel with a high-temperature coefficient of expansion. The chamber is designed to withstand aggressive processing conditions and is capable of operating continuously for up to one year without maintenance. A top-mounted load lock allows for high-speed processing and quick access to substrates. The power supply utilized in TOKYO ELECTRON Unity EP is a four-stage DC pulse control system, which can generate precise and repeatable etch parameters across a wide range of process conditions. This ensures exact geometries and precise density control. At the heart of UNITY-EP is the micro-processing center, which is based on the latest technology. This micro-processing core includes sophisticated local and global temperature control, advanced process monitoring, and PD detection. The system also includes a recipe editor, allowing users to set up and automate their etch recipes. The three additional modules of Unity EP provide additional processing capabilities. The wafer processing module is designed to maximize process throughput and eliminate particle contamination. The wet bench cleaning module helps to ensure precise etching in a clean and efficient manner. Finally, the etch-sensing module provides precise monitoring and detection of critical etch parameters. Overall, TEL / TOKYO ELECTRON UNITY-EP from TEL is a highly advanced etcher or asher designed for use in the semiconductor industry. It functions like a well-oiled machine and provides precise and repeatable geometries and density control regardless of the process conditions. The unit is further backed by a powerful cluster of hardware and software modules, allowing users to tailor the unit to meet their needs.