Used TEL / TOKYO ELECTRON Unity EP #9084597 for sale

TEL / TOKYO ELECTRON Unity EP is a high-precision etching/ashing equipment designed for electronics manufacturing applications. It features a high-precision etching/ashing system with 100nm control stability and is capable of etching/ashing semiconductor substrates with thicknesses ranging from 200nm to 10mm. TEL Unity EP features a continuously adjustable aspect ratio window (CARW) which allows for a user-defined aspect ratio window to be established. This enables the precise etching/ashing of specific device geometries. The unit is also equipped with a high-resolution laser-based alignment machine for improved accuracy and reliability. TOKYO ELECTRON UNITY-EP utilizes a high-vacuum (<25mbar) for improved etching/ashing performance. This ensures a clean and efficient etching/ashing cycle. The tool also includes a high-vacuum load-lock allowing for secure transfer of wafers into and out of the asset. TEL / TOKYO ELECTRON UNITY-EP has sophisticated motion stage controller capabilities which enable high-speed operations. The model is equipped with a high-precision electro-mechanical positioning equipment. This ensures the accurate placement of etched or ashed patterns. TOKYO ELECTRON Unity EP provides a powerful software suite for controlling pre-programmed and customizable etching/ashing processes. This includes advanced process control capabilities. The software includes a graphical user interface that simplifies the etching/ashing process setup and gives the user advanced monitoring and control capabilities. TEL UNITY-EP is highly flexible and can be configured to fit into a variety of manufacturing applications. It can be used for etching/ashing a variety of substrates including silicon, compound semiconductors, and III-V materials. It can also be used for performing multiple etch/ash processes on a single wafer. UNITY-EP is a reliable and high-performance etching/ashing system which provides users with the flexibility and accuracy needed for critical electronics manufacturing applications.