Used TEL / TOKYO ELECTRON Unity EP #9144791 for sale

TEL / TOKYO ELECTRON Unity EP is a high-performance, multi-function etcher/asher. It is designed to provide the user with a reliable, cost efficient, and broad process capability. The underlying architecture of TEL Unity EP equipment is built around multiple, specialized source controller boxes, including a gas supply control system, a process monitor, and a control console unit. This unified architecture not only facilitates process optimization and minimizes user interaction, but also results in superior unit performance. In terms of process capability, TOKYO ELECTRON UNITY-EP etcher/asher is able to deliver high etching/drying factors in a variety of etching/drying chemistries. With temperatures ranging from 100 to 500 degrees Celsius and an inlet pressure of up to 0.5 Pa, it is capable of processing wafers from a variety of materials, such as Si, GaAs, and InP. A variety of options are available for customizing TEL UNITY-EP etcher/asher, including various gas piping modules, mechanical pipe changers, and remote access modules. Furthermore, the machine is constructed to be flexible, allowing for the integration of various other available options and upgrades, such as a laser interferometer, door-lock tool, or auto-pulse pilot arc. Finally, TEL/TOKYO UNITY-EP etcher/asher is designed to ensure a high level of safety and reliable performance through several design features, such as enriched Safety Functions, Start/Mute Functions, and an optional auto-pulse arc asset. To this end, it is also compliant with the international safety regulations and standards, delivering a secure and efficient etching/drying process. Overall, TOKYO ELECTRON/TOKYO Unity EP etcher/asher makes an ideal choice for demanding etching/drying applications that require high performance and robust process capabilities. The combination of its energy efficient frame, reliable architecture, and intuitive controls results in a product that is easy to use and highly efficient, making it an ideal choice for professionals in the semiconductor industry.