Used TEL / TOKYO ELECTRON Unity EP #9180754 for sale

TEL / TOKYO ELECTRON Unity EP is a state-of-the-art etcher/asher intended for the semiconductor industry. It is a tool with advanced functions that increase etch rate, provide uniform etching and excellent process reproducibility. It utilizes dual energy operation with electron beam and ion beam outputs for precise patterning of materials. It is a powerful tool for producing high-yield patterns with minimized defectivity. TEL Unity EP's primary features are its capable discharge chamber and its stacked-structure processing sequence. Its discharge chamber is lined with a highly effective insulator that prevents heat improvement while the highly efficient gas chamber provides ideal accuracy for etching or ashing processes. This is made possible with a highly precise 3-dimensional patterning that enables two-step etching (or ashing). TOKYO ELECTRON UNITY-EP also provides an improved gas supply equipment which features a distribution type gas supply and a newly designed injection system. The former offers more uniform gas delivery and the latter provides higher gas pressure, enabling uniform processing on a wide range of substrates. Unity EP also supports the use of Multi-Etch Plan (MEP), an advanced performance control software. This allows users to control the device's etch and substrate temperature, etch rate, and gas mix settings with ease. As an added bonus, MEP can be used to store data for up to twenty days so users can record and keep track of their etch process history. TEL UNITY-EP also features a standard device management unit. This allows remote operation of the device and also contains information about device specific hardware and software information. Lastly, there is a comprehensive maintenance machine. This tool allows operators to manage and monitor etching and ashing process, error history, and routine maintenance. In conclusion, UNITY-EP is an advanced etcher/asher that focuses on providing uniform etching and excellent process reproducibility. Its highly advanced features allow for precision patterning of materials, improved gas supply systems, and a comprehensive maintenance asset. With its powerful ability to produce high-yield patterns with minimal defectivity, this etcher/asher is an indispensable tool in the semiconductor industry.