Used TEL / TOKYO ELECTRON Unity EP #9188580 for sale

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ID: 9188580
Wafer Size: 8"
CVD System, 8" (3) TiN Chambers Electrical cabinet included.
TEL / TOKYO ELECTRON Unity EP is an advanced, high-performance electron beam etcher/asher. It employs a unique combination of high-throughput processing and low-energy etching to create highly precise patterns on various materials. TEL Unity EP utilizes a closed-loop electron beam scanning equipment and a variety of pattern generation techniques to create finely detailed surface features on various substrates. To ensure high precision, TOKYO ELECTRON UNITY-EP is equipped with an extremely precise beam position control system and an advanced, high-speed beam deflection control unit. The closed-loop electron beam scanning machine is capable of providing uniform etching patterns over a wide area. The machine is also capable of aligning different process features by matching the same beam position to ensure repeatability. In addition, TEL / TOKYO ELECTRON UNITY-EP is equipped with a powerful semiconductor pattern generator. This pattern generator is capable of quickly creating highly intricate patterns that are used to etch precise features on materials such as silicon-based wafers. The highly detailed patterns created by Unity EP enable highly advanced etching techniques that are not possible with the traditional "blanking" method. Etching with TEL UNITY-EP enables high-throughput operation with extremely low processing temperatures. This low-energy etching process reduces the risk of uneven etching caused by high temperature gradients. This etching efficiency allows it to create complex patterns while preserving the substrate's core properties. The machine is also capable of detecting edge sharpness, as well as controlling the angle and aspect ratio of the etched features. TOKYO ELECTRON Unity EP also features a high resolution video visualization tool and precise beam energy control. This asset improves precision of pattern creation and allows the model to properly match patterns throughout the entire wafer. Overall, UNITY-EP is a powerful and highly precise electron beam etcher/asher that is considered the industry standard for creating ultra-precise patterns.
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