Used TEL / TOKYO ELECTRON Unity EP #9208203 for sale

TEL / TOKYO ELECTRON Unity EP is an advanced etch/ash equipment designed for ultra-high resolution, high-throughput processing. The system features three main components: a base station, a precision plasma source, and a removable chamber. The base station provides both process control and a monitor interface. The plasma source delivers high-energy, high-density plasma, ensuring optimal etching and ashing performance. The removable chamber assemply houses the work-piece, offering ideal chamber conditions and allowing for ease of exchange between different etching/ashing processes. The unit is equipped with a variety of process control and monitoring systems to ensure efficient and accurate processing. The precison plasma source is regulated by an advanced digital power supply, which offers precise and consistent power levels for each cycle. The on-board machine diagnostic systems monitor the work-piece temperature, plasma discharge, etch/ash rate, and other variables, allowing for early detection of process deviations. Additional tool safety features are included to protect the integrity of the device and the environment. TEL Unity EP is capable of handling various etching and ashing processes, including plasma etching, wet etching, physical etching, and an isolation etch. Plasma etching and physical etching are supported through the asset's programmable control model. Complex etching and ashing processes are quickly and accurately performed, enabling high throughput processes. TOKYO ELECTRON UNITY-EP also incorporates a variety of advanced features such as auto-diagnostics and an inline sensor, allowing for real-time process observation and control of etching/ashing cycles. UNITY-EP is designed for robust, high-precision processing. The equipment features advanced micro-processing techniques and closed-loop control, providing high accuracy and repeatability. The system is also highly power efficient, allowing for long process cycles and minimized energy consumption. All components used for the unit are tested for top performance to ensure maximum performance and reliability. TEL / TOKYO ELECTRON UNITY-EP is an etch/ash machine specifically designed for ultra-high resolution processing. Featuring advanced process control systems, precision plasma source and removable chamber, the tool ensures optimal etching and ashing performance for a variety of etching and ashing processes. The asset is highly power efficient and reliable, providing a robust solution for high-performance, high-throughput processing.