Used TEL / TOKYO ELECTRON Unity EP #9236828 for sale

TEL / TOKYO ELECTRON Unity EP is an advanced etcher/asher. It is suitable for a variety of applications such as TFT-LCD, OLED, IC, and MEMS fabrication. It is known for its exceptional etching and ashing performance, along with its support for advanced processes. TEL Unity EP is a multi-station, multi-gas etcher/asher. It is capable of delivering precise process control over etch rate, uniformity, selectivity, sidewall profile, and contamination-free surfaces. It features an automated charge compensation system to ensure consistent process outcomes regardless of mass or layering of the substrate. It is also equipped with advanced gas delivery and mass flow control systems to support etch rates up to ten times faster than conventional etchers. Furthermore, it is capable of supporting complex processes with multiple etch sources and multiple gases. In addition, TOKYO ELECTRON UNITY-EP offers a modular design to simplify and accelerate maintenance and integration. It ensures that fewer parts and components are needed to install and maintain the asher. It also offers enhanced monitoring systems to provide enhanced productivity and process stability. The process control system has an intuitive graphical user interface to allow for simple process set up and recipe development. Unity EP is well suited for a wide range of applications, with its advanced etching and ashing expertise and support for modern processes. It offers advanced process stability and control to deliver cost-effective solutions for mass production. Furthermore, it is highly energy efficient, making it a great choice for environmentally conscious manufacturers.