Used TEL / TOKYO ELECTRON Unity EP #9237259 for sale

TEL / TOKYO ELECTRON Unity EP
ID: 9237259
Wafer Size: 8"
Vintage: 2005
CVD System, 8" 2005 vintage.
TEL / TOKYO ELECTRON Unity EP is an etcher/ asher equipment designed for photovoltaic cell applications. This system is a collaborative effort between TEL and TOKYO ELECTRON, with each providing its own unique expertise in the field. It has been designed to provide stable and uniform etching and ashing processes to improve photovoltaic cell efficiency and yield. TEL Unity EP integrates a 2-chamber, advanced design and is built around a newly-developed wafer boat structure optimized for uniform etching and ashing of thin and thick silicon wafers. The unit is designed to allow for optimal wafer uniformity and reproducibility, with a unique plasma delivery machine that reduces the differences in the plasma energy, thus reducing processing variation. This tool further employs a true two-piece wafer boat design, which greatly improves the etching uniformity between the top and bottom of wafer lot. In addition, the advanced wafer boat design works in concert with a regenerative exhaust asset to ensure that all plasmas are at uniform temperatures, enabling a consistent process. TOKYO ELECTRON UNITY-EP also offers the highest plasma power densities available, ensuring excellent etching of photovoltaic cells. With its enhanced etching uniformity capabilities, TOKYO ELECTRON Unity EP achieves up to a 6x improvement in etching uniformity versus industry standards. It also provides a wide range of process recipes for etching and ashing, giving users greater flexibility to customize their process. Unity EP also comes equipped with advanced features such as a wafer loss counter model, auto-tune plasma control, and remote diagnostics. These features, combined with great capabilities such as real-time wafer temperature readout, make TEL / TOKYO ELECTRON UNITY-EP an ideal choice for photovoltaic cell processing applications. TEL UNITY-EP is a comprehensive photovoltaic cell processing tool. Its advanced etching and ashing capabilities, combined with reliable process recipes and advanced features, make it an excellent choice for any photovoltaic cell developer or researcher. Moreover, UNITY-EP provides improved process efficiency and yield, allowing photovoltaic cell developers to achieve maximum productivity from their cells.
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