Used TEL / TOKYO ELECTRON Unity IeM #293807031 for sale
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ID: 293807031
Oxide etcher
AC Rack type: ECC V1
TMP / Robot: 007 / 008 (VS2E)
FT-1200W Pump.
TEL / TOKYO ELECTRON Unity IEM (Dry Strip Etch machinery) is the latest in dry film etching technology. TEL Unity IEM is capable of high-precision etching on various substrates including silicon and other semiconductor materials, metal, insulator, and organic materials. It is also suitable for post-etch processes such as surface cleaning, oxide removal, and doping. TOKYO ELECTRON Unity IEM has a robust design with three independent process chambers and is capable of together handling process jobs of up to 500mm in diameter. It features a high degree of precision in etching, ensured by a combination of air heaters, forced-air cooling, and an integrated process control equipment. The air heaters allow the set process recipe to be accurately replicated so that the end-product is uniformly etched. The forced-air cooling system cools down the substrate quickly, avoiding undesired thermal expansion and improving product performance. The process control unit also allows precise etching, as it continues to monitor conditions let's the operator adjust the process parameters as needed. Unity IEM uses a safe and efficient consumable technology, where the etch material is released in just the right amount for each substrate. It also features a reliable evacuation, ensuring that the magnetic fields generated by the etcher do not reach the substrate, thus preventing damage or contamination. Additionally, TEL / TOKYO ELECTRON Unity IEM has an intuitive GUI that can be used to provide detailed descriptions of recipe steps, thus helping the operator understand any changes made during the process. Moreover, TEL Unity IEM is designed to be user-friendly—allowing the operator to adjust the etch recipe parameters, like time, pressure, and intensity without a separate control machine. This also allows for full customization of the etch process, enabling users to tailor their process to their specific needs. In summary, TOKYO ELECTRON Unity IEM is a powerful dry film etching tool that is designed to enable accurate etching on a variety of substrates, allowing for efficient product customization. It provides superior performance due to its air heating, forced-air cooling, and integrated process control technology, while its consumable technology and reliable evacuation help maintain efficient and safe operation. Additionally, the user-friendly GUI leaves no room for errors and makes it possible to easily adjust the etch recipe parameters without a separate control asset. With Unity IEM, businesses can have a reliable dry film etching solution that is suited to their unique parameters and requirements.
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