Used TEL / TOKYO ELECTRON Unity IeM #9128639 for sale

TEL / TOKYO ELECTRON Unity IeM is a next-generation etcher/ asher designed to provide highly accurate and reliable etching and ashing solutions. This etcher/ asher is designed with advanced etching technology to enable a wide process window, improved process uniformities, and better integration with equipment components. It features a unique full-spectral etch process control for improved etch step uniformity, higher throughput, and better passivation performance. It also includes an easy-to-use control equipment for recipe development, and an Advanced Mechantronics Module (AMM) to ensure consistent and repeatable results. TEL Unity IeM is suitable for a wide variety of etching and ashing applications, including advanced packaging, MEMS, and wafer level packaging. Its advanced design provides reliable performance with increased production efficiency and improved system uniformity. It uses high- performance light elements to create a uniform illumination over a large area for efficient etch results. The innovative Multi-Head Etching Unit (MHES) was designed for simultaneous etching and ashing process in a single machine, resulting in a smaller, faster tool with improved performance and flexibility. TOKYO ELECTRON Unity IeM includes a patented vacuum chamber design for excellent etch step uniformity and process control. The asset also includes an advanced mechanical catch-release model for efficient handling of sample pieces. it products are also designed for easy installation and integration with other equipment components. The equipment also includes software for recipe development to ensure accurate results. Finally, the etcher/ asher system includes a variety of safety features, including an emergency shut-off unit and built-in warning lights and alarms. Overall, Unity IeM is the next-generation etcher/ asher which is designed to provide highly accurate and reliable etching and ashing solutions. It features advanced etching and ashing technology, easy-to-use control systems, and a variety of safety features to ensure accurate and repeatable results. This machine is suitable for etching and ashing a variety of advanced technologies, including advanced packaging, MEMS, and wafer level packaging.