Used TEL / TOKYO ELECTRON Unity II 850DI #9092958 for sale

TEL / TOKYO ELECTRON Unity II 850DI is a reliable and high-performance etcher/asher designed for medium scale processes. It offers excellent etching and ashing capabilities, high throughput and repeatable process results. TEL Unity II 850DI is an inductively coupled plasma (ICP) etcher/usher capable of operating at up to 1000W plasma source power. It's constructed with a unique octahedral electrode reactor which enables the efficient delivery of high plasma power, providing powerful, efficient etching and ashing. The equipment also features a high precision wafer/gas aligner and a low coefficient of friction motion system which maximizes the uniformity of patterning and improves the machining accuracy. The unit is equipped with a unique ET control algorithm that automatically adjusts the gas flow rate, along with external pressure control. The control algorithm is able to compensate automatically for gas flow and pressure variations while keeping process conditions uniform, minimizing line edge roughness and greater process repeatability. The machine also includes a gas delivery line monitor that provides real-time gas pressure and flow measurement. The tool is also capable of capabilities of with high-precision part processes and features independent chamber heating capability for improved temperature uniformity and repeatability. It comes with built-in AR/VF detailing as well as variable corona control for reliable SE/BE/Z-Corona sources. In-situ diagnostics ensure wafer processing consistency, while an adaptive reactive gas monitor adjusts automatically according to process conditions. TOKYO ELECTRON Unity II 850DI also offers superior performance and ultra-low sulfur dioxide usage. It features advanced wafer handling capabilities such as an in-situ wafer pinion and plasma guider for high-precision wafer alignment in addition to a high reliable wafer table with no warm-up time. The asset meets modern regulatory standards and limits the particulate and sulfur dioxide emissions. Unity II 850DI is the ideal choice for advanced etching and ashing processes, offering repeatability, reliability and outstanding process capabilities. With its high throughput, highly efficient operation, extremely low sulfur dioxide emissions and in-situ diagnostics, it is designed to comprehensively fulfill all customer expectations.