Used TEL / TOKYO ELECTRON Unity II 855SS #9179093 for sale

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ID: 9179093
Wafer Size: 8"
Vintage: 2003
Oxide etcher, 8" Missing parts: UPS V2 Control rack power supply Currently de-installed 2003 vintage.
TEL / TOKYO ELECTRON Unity II 855SS is a next-generation etcher / ashrer designed for the most demanding industrial applications. The equipment is a reliable and efficient etching / ashering process for fine line features and semiconductor products. It has an intuitive human interface with user-friendly programs and an optimized colour monitor for precise control of the etching / ashering process. The process can effectively work on components as small as 0.25 micron, and is capable of etching / ashering up to 150mm wafers. It is equipped with a high-capacity 500m3/sec dry-air annealing system for effective heat treatments, as well as with a full-feature, auto-responding wafer transport unit. The machine's low voltage etching / ashering produces high quality etched / ashered patterns with minimal material loss, and features fast switching of etchant/ashers and regimes for improved productivity. The tool includes an advanced diagnostics program for accurate fault determination and master files for wafer recall, so that production can be resumed quickly and efficiently. The unit also features high-accuracy E-Gun and B-Gun control functions, as well as beam-delivery controls for faster process cycles. Overall, TEL Unity II 855SS is a reliable and efficient etching / ashering asset that can effectively produce high-quality fine line features and semiconductor products.
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