Used TEL / TOKYO ELECTRON Unity II 85DD #188831 for sale
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ID: 188831
Dry Etch/Oxide, 8"
SMIF Interface Ready
Software version: 3.00 Rev 206-PMS-3.11a
Chambers:
PM 1: Unity II 85 DRM Oxide Etch
ESC Type: Ceramic
Process Kit Material: Quartz
Lower RF: ENI OEM-25B
Turbo: Ebara ET600WS
PM 2: Unity II 85 DRM Oxide Etch
ESC Type: Ceramic
Process Kit Material: Quartz
Lower RF: ENI OEM-25B
Turbo: Ebara ET600WS
Process Kit:
Botttom Electrode: 1D10-100582-14
Upper Electrode: 1D10-201429-15
Focus Ring: 1D10-302209-14
Plate Baffle: 1D10-100854-14
Shield Depo: 1D10-303124-16
Ring Insulator: 1D05-300052-13
Cover Bellows: 1D10-200734-14
Chiller: SMC INR499-201
1997 Vintage.
TEL / TOKYO ELECTRON Unity II 85DD is an asher / etcher equipment designed for cleaning, texturing, and etching silicon wafers in semiconductor fabrication processes. The system is designed to provide precise, repeatable results for applications such as cleaning and etching, as well as for micromachining applications. With TEL Unity II 85DD, users can program processes using either a intuitive graphical user interface (GUI) or a powerful command language. The unit features a 8.5 inch full color SVGA touchscreen allowing for easy operation and programming. The unit features four independent process chambers connected to the base unit, enabling efficient, multi-chamber wafer processing. The chambers have a maximum operating temperature of 400°C and are designed for dry and wet processes. TOKYO ELECTRON UNITY II 85 DD offers a wide range of process capabilities, including plasma etching, metal oxide/hydrogen etching, etching of polymers and resist films. The machine also features integrated gas handling capabilities with low-flow automatic gas switching to minimize chemical waste. UNITY II 85 DD offers precise process control with 6-axis accuracy and control. Users can program and monitor recipes in real-time, allowing for the quick modification of processes mid-run. Tool data can be exported digitally for easy interpretation of results, and TEL UNITY II 85 DD features auto-tuning functions to optimize settings for maximum throughput and repeatability of results. In addition to the standard configuration, the unit can be outfitted with a variety of accessories and integrated technologies. Unity II 85DD is compatible with a range of end-effectors, including brushes, magnets, tweezers and nozzle manifolds. Integrated options such as automatic wafer-handling, automated gas handling and automatic pressure control further streamline processes. In sum, TEL / TOKYO ELECTRON UNITY II 85 DD offers a powerful, easy to use etching and cleaning asset for a variety of applications. It is constructed to precise specifications, with integrated motorized stages, and an intuitive graphical interface that allow users to quickly and easily program and execute process sequences. With its automated handling options and advanced process capabilities, the unit is an ideal solution for fabricators of all sizes.
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