Used TEL / TOKYO ELECTRON Unity II #9105196 for sale

TEL / TOKYO ELECTRON Unity II is an etcher/asher that is used for plasma etching and ashing processes. TEL Unity II features a patented shield chamber, which allows for a tight balance of ions, electrons, and neutral particles during etching and ashing. This ensures a precise etching and ashing process without the need for extra recirculation of gases or organic contamination. The equipment is also highly efficient, using an optimized plasma system to ensure greater uniformity of etching and ashing. TOKYO ELECTRON Unity II allows for versatile process control, including auto-control of chamber conditions, DC bias, process time, pressure, and gas flow conditions. This helps to eliminate guesswork and ensures consistent results throughout the etching and ashing cycle. The unit also includes an active chamber contamination monitoring machine, which helps to prevent unnecessary process deviation due to particle deposition on the chamber walls. Unity II is designed to control both plasma etching and ashing processes simultaneously, allowing the user to adjust parameters and view both types of processes at the same time. This helps to avoid distractions and allows the process to run optimally. Additionally, precise control of air mass flow, filtering of air particles, etching/ashing mix numbers, and argon etch rate are possible using TEL / TOKYO ELECTRON Unity II. TEL Unity II also includes state-of-the-art safety features to prevent injury and destruction of materials. It includes an optical emission spectroscopy (OES) that auto-controls emission rates by shutting off the power supply in case of excessive emission. Additionally, TOKYO ELECTRON Unity II is designed to minimize stray magnetic fields by auto-questioning stray charged particles and preventing them from passing through the process chamber. Overall, Unity II is a reliable and efficient etcher/asher with a wide range of process control features. Its versatility, safety, and consistency make it an ideal machine for a variety of etching and ashing processes.