Used TEL / TOKYO ELECTRON Unity II #9227407 for sale

TEL / TOKYO ELECTRON Unity II
ID: 9227407
Wafer Size: 8"
Etcher, 8".
TEL / TOKYO ELECTRON Unity II is an etcher/asher equipment developed by TEL Ltd for the precision processing of wafers. It is designed to replace the traditional and costly wet etching process and provides superior throughput and accuracy due to the use of a highly precise scanning electron beam (SEB) process. It is equipped with software-controlled beam optimization and uniformity correction, which ensures that the etching result meets the highest expectations for reliability and accuracy. TEL Unity II is designed for the rapid manufacturing of MEMS and nanotechnology products and microsystems, as well as for research and development. The machine is equipped with multiple beam scanning options and variable RF powers, allowing for a wide range of applications, such as dielectric etching, crystalline etching, and selective etching of material between two layers. The machine is also capable of sputter etching and is equipped with automatic process optimization routines that minimize defects, thereby achieving the highest possible yield. TOKYO ELECTRON Unity II is both highly versatile and user-friendly. It is equipped with a laden system that allows for the selection and loading of up to 150 wafers in both standard and non-standard sizes, reducing labor costs and eliminating manual handling. The unit is also supplied with a variety of process chambers specifically designed to work with the unique requirements of each application. It also has an array of advanced diagnostics and control interfaces, allowing for the continuous monitoring and adjustment of the lithography process. Unity II is designed for maximum throughput, reliability and accuracy. It is equipped with an over-sized beam spot size and a high-voltage electron gun for accurate beam control. Its 8-stage vacuum pumping machine allows for rapid evacuation and reduces the risk of contamination. It also has a range of safety and protection features, including a high-speed shutter that covers the electron beam during maintenance and cleaning, as well as a double-door access port for safe operation. In summary, TEL / TOKYO ELECTRON Unity II is a powerful and reliable etcher/asher that is ideal for a variety of high-precision applications. Its superior accuracy and throughput, coupled with its user-friendly design and advanced safety features, make it an excellent choice for precision wafer processing.
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