Used TEL / TOKYO ELECTRON Unity IIe 655II #293764223 for sale

ID: 293764223
Oxide etcher.
TEL / TOKYO ELECTRON Unity IIe 655II is an advanced etcher / asher equipment designed to accurately process a wide range of substrates, such as silicon wafers, copper wafers and other organic and inorganic materials. The system is equipped with a chamber matched to the substrate type, ensuring precise processing. The unit also utilizes superior source matching, achieving high uniformity uniform etching results. An additional benefit of TEL Unity IIe 655II is its advanced features including Ethernet connectivity for remote monitoring and parametric analysis. The machine utilizes the latest in etching and ashing technology with ExactWeigh™ and multiple substrate loading and unloading capabilities. TOKYO ELECTRON Unity IIe 655II can process up to eight 4-inch, 6-inch, and 8-inch substrates in both batch and single-wafer, multi-step process sequences. This tool comes with an onboard tester to ensure cycle consistency and process repeatability, and its datalogging enables traceability and rapid process optimization. Unity IIe 655II features a SINTEF NExp™ compatible etch/ash process controller which provides superior automatic flow control, temperature control, pressure control, and vacuum control. The asset is also compatible with TEL Sophisticated Solution™, software for creating recipes that can be downloaded directly into the model. This software also allows the operator to create and store recipes for future use. One of the unique features of TEL / TOKYO ELECTRON Unity IIe 655II is its Gas Dynamic Dose (GDD)™ technology, which ensures a precisely managed dose of processing gas during each substrate's processing cycle. This GDD™ technology, combined with the equipment's advanced source matching and multi-step processes, ensures accurate, uniform etching results. Additionally, the system also features a recirculation unit, allowing the processing of multiple substrates in the same chamber without compromising the quality of the etching results. TEL Unity IIe 655II is an exceptional etcher / asher machine. With its advanced features, precision cleaning capabilities, and high level of etching quality and uniformity, it is the ideal etching solution for a wide variety of material processing needs. TOKYO ELECTRON Unity IIe 655II offers an excellent return on investment, providing long-term reliability and unequalled process performance capabilities.
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