Used TEL / TOKYO ELECTRON Unity IIe 655PP #293796081 for sale

TEL / TOKYO ELECTRON Unity IIe 655PP is a type of etcher/asher designed to deposit thin films over a range of substrates. It is a large, industrially capable machine with quadruple end-point detection. It is a good choice for applications where very precise thin film deposition is required. TEL Unity IIe 655PP has a large chamber, approximately 18"x30" (45 cm x 76 cm), and features a dual-chamber design that allows for simultaneous deposition in both chambers. A quartz tube furnace (powered by four 500W IR lamps) heats each chamber to temperatures up to 500 °C, and the rear of the machine houses a special coil that provides a substrate bias voltage of up to -100 volts. TOKYO ELECTRON Unity IIe 655PP utilizes a sophisticated end-point detection system. It combines a Quadruple Endpoint Detector (QED) with a Digital Image Processor (DIP), both of which are embedded into the machine's controller. The QED uses four infrared detectors in the quartz tube to monitor film thickness and uniformity, while the DIP analyzes images taken by a special camera located within the chamber. This allows for highly precise thin film deposition and can give scientists valuable feedback regarding the quality of the etching or ashing process. Unity IIe 655PP also has the capability to perform plasma etching, with the assistance of a plasma source installed into the chamber. A special feature of this machine is the Spike-ID: an advanced, proprietary etch technology that allows for precise creation of small structures or features, as well as high-aspect-ratio structures. Overall, TEL / TOKYO ELECTRON Unity IIe 655PP is an excellent etcher/asher for a range of applications. Its sophisticated end-point detection system and capability to perform both thin film deposition and plasma etching make it a great choice for ultra-precise applications requiring high precision and small structures.