Used TEL / TOKYO ELECTRON UNITY IIE 845DD #9377255 for sale

TEL / TOKYO ELECTRON UNITY IIE 845DD is an advanced etcher/asher for silicon wafers in the microelectronics industry. It is designed to etch and ash silicon wafers with a high degree of precision and accuracy. The 845DD etcher/asher utilizes a 3-axis (x-y-z) robot for automated wafer manipulation. It uses a precise wafer manipulator robotics with three high resolution linear stages to enable the accurate transfer of wafers between the in-process chamber and multiple wafer pods as well as the precise, high speed manipulation of wafers in the process chamber. The wafer pods provide a secure and stable environment for wafers during processing. The 845DD etcher/asher is equipped with an active cooling equipment and an efficient heating system for both the wafer process chamber and the wafer pods. The active cooling unit features a temperature control with a precision of 0.1°C and is capable of cooling both the wafer process chamber and the wafer pods to a temperature of -15°C in just a few minutes. The heating machine features a dual-zone temperature control and is capable of quickly heating up the wafer process chamber to the desired set temperature. The 845DD etcher/asher is also equipped with advanced 3D resist imaging capability. This capability consists of laser etching, which is used to pattern a 3D resist in a non-planar fashion, allowing for the formation of a complex 3D structure on the wafer. The 845DD etcher/asher also features advanced recipe management features for faster process development and optimization. The 845DD etcher/asher is capable of processing multiple wafers simultaneously, with the process time dependent on the type of wafer being etched/ashed and the desired process results. Depending on the application, it can etch/ash wafers with lateral or depth resolution as small as 1nm. The 845DD etcher/asher is also equipped with a reliable safety tool and a robust monitoring asset to ensure smooth and error-free operation. Overall, TEL UNITY IIE 845DD provides a reliable, high-precision etcher/asher for the microelectronics industry. It features advanced robotics and a wide range of etching and ashing capabilities, making it a suitable tool for the fabrication of complex 3D electronic devices.