Used TEL / TOKYO ELECTRON Unity IIe 855D #197625 for sale

TEL / TOKYO ELECTRON Unity IIe 855D
ID: 197625
Wafer Size: 8"
Vintage: 1996
Oxide etcher, 8", parts machine (2) Chambers 1996 vintage.
TEL / TOKYO ELECTRON Unity IIe 855D is a high-performance etcher/ asher which provides a superior combination of throughput, uniformity, and throughput to meet the diverse needs of production and research applications. The equipment combines advanced features such as ultra-fast photo-solution processing, chemical temperature control, and a high-speed robot with a space efficient design. Additionally, this etcher/ asher is customized to the user's application and offers the highest productivity with superior quality. TEL Unity IIe 855D is equipped with a fast and accurate robotic system. The robot features advanced 4-axis motion control which improves performance and accuracy of processes. Also, the robot is equipped with anti-rusting aluminum alloy frame to ensure superior long-term reliability and stability. Furthermore, this etcher/ asher has an 8-inch nozzle which allows high-precision etchant delivery and the capability to perform both linear and circular scanning at high speed. TOKYO ELECTRON Unity IIe 855D offers a range of etchant solutions with optimized photolithography and chemical processing. It is designed to offer unmatched quality and repeatability of the etching process with features such as multi-beam processing, rapid CMP solution processing, and high accuracy etching. The unit also features a temperature control machine which enables precise control of the chemical temperature of the etching solution for optimal development of the etching process. Unity IIe 855D provides excellent safety and reliability of the etching process. It is designed to be highly resistant to corrosion and abrasion, and is equipped with dry running protection technology. This safety feature protects the machine from breakdowns due to overloading or inadequate servicing. Also, the tool is equipped with a built-in safety controller so that the operation is monitored with high accuracy in real time and safety control is exercised efficiently. Overall, TEL / TOKYO ELECTRON Unity IIe 855D is an advanced etcher/ asher which is customizable to the user's needs and provides superior quality and speed of etching. With features such as a fast and accurate robot, advanced photolithography and chemical processing, temperature control asset, and built-in safety controller, this model is a great choice for etching applications in both production and research settings.
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